Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165894 | Processing method, method of manufacturing semiconductor, and substrate processing apparatus | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Tadashi Takasaki | 2024-12-10 |
| 12093021 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Naofumi Ohashi, Toshiyuki Kikuchi, Tadashi Takasaki | 2024-09-17 |
| 11891697 | Substrate processing apparatus | Naofumi Ohashi, Takashi Yahata, Yukinori Aburatani | 2024-02-06 |