Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131902 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Naofumi Ohashi, Tetsuo Yamamoto | 2024-10-29 |
| 11891697 | Substrate processing apparatus | Naofumi Ohashi, Takashi Yahata, Shun MATSUI | 2024-02-06 |