Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106998 | Substrate processing apparatus, substrate processing method, non-transitory computer-readable recording medium and method of manufacturing semiconductor device | Naofumi Ohashi, Masanori NAKAYAMA | 2024-10-01 |
| 11967513 | Substrate processing apparatus | Naofumi Ohashi, Tadashi Takasaki | 2024-04-23 |
| 11923173 | Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Naofumi Ohashi, Tadashi Takasaki | 2024-03-05 |
| 11905596 | Method of manufacturing semiconductor device, and recording medium | Takeshi Yasui, Masaki Murobayashi, Koichiro Harada, Tadashi Terasaki, Masanori NAKAYAMA | 2024-02-20 |