Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11905596 | Method of manufacturing semiconductor device, and recording medium | Teruo Yoshino, Takeshi Yasui, Masaki Murobayashi, Tadashi Terasaki, Masanori NAKAYAMA | 2024-02-20 |
| 11869748 | Substrate processing apparatus and method of manufacturing semiconductor device | Takeshi Yasui, Katsunori FUNAKI, Yasutoshi TSUBOTA | 2024-01-09 |