Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154826 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masanori NAKAYAMA, Tatsushi UEDA, Yasutoshi TSUBOTA, Yuichiro TAKESHIMA, Hiroto IGAWA +1 more | 2024-11-26 |
| 12040161 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yasutoshi TSUBOTA, Masanori NAKAYAMA, Tatsushi UEDA, Eiko TAKAMI, Yuichiro TAKESHIMA +3 more | 2024-07-16 |
| 11908682 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Hiroto IGAWA, Masanori NAKAYAMA, Tatsushi UEDA, Yasutoshi TSUBOTA, Eiko TAKAMI +2 more | 2024-02-20 |
| 11869748 | Substrate processing apparatus and method of manufacturing semiconductor device | Takeshi Yasui, Yasutoshi TSUBOTA, Koichiro Harada | 2024-01-09 |