Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040161 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yasutoshi TSUBOTA, Masanori NAKAYAMA, Katsunori FUNAKI, Tatsushi UEDA, Yuichiro TAKESHIMA +3 more | 2024-07-16 |
| 11908682 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Hiroto IGAWA, Masanori NAKAYAMA, Katsunori FUNAKI, Tatsushi UEDA, Yasutoshi TSUBOTA +2 more | 2024-02-20 |