Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154826 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsunori FUNAKI, Tatsushi UEDA, Yasutoshi TSUBOTA, Yuichiro TAKESHIMA, Hiroto IGAWA +1 more | 2024-11-26 |
| 12106998 | Substrate processing apparatus, substrate processing method, non-transitory computer-readable recording medium and method of manufacturing semiconductor device | Naofumi Ohashi, Teruo Yoshino | 2024-10-01 |
| 12040161 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yasutoshi TSUBOTA, Katsunori FUNAKI, Tatsushi UEDA, Eiko TAKAMI, Yuichiro TAKESHIMA +3 more | 2024-07-16 |
| 11905596 | Method of manufacturing semiconductor device, and recording medium | Teruo Yoshino, Takeshi Yasui, Masaki Murobayashi, Koichiro Harada, Tadashi Terasaki | 2024-02-20 |
| 11908682 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Hiroto IGAWA, Katsunori FUNAKI, Tatsushi UEDA, Yasutoshi TSUBOTA, Eiko TAKAMI +2 more | 2024-02-20 |