Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12091751 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Naofumi Ohashi, Satoshi Takano | 2024-09-17 |
| 11948778 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Shin Hiyama, Toru Kakuda, Toshiya Shimada | 2024-04-02 |
| 11942333 | Method of manufacturing semiconductor device, cleaning method, and non-transitory computer-readable recording medium | — | 2024-03-26 |