Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087598 | Substrate processing apparatus | Hideto Tateno, Daisuke Hara, Masahisa Okuno, Takuya JODA, Takashi Tsukamoto +2 more | 2024-09-10 |
| 11948778 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Hidehiro Yanai, Shin Hiyama, Toshiya Shimada, Tomihiro Amano | 2024-04-02 |