Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131934 | Semiconductor substrate support leveling apparatus | Katherine Woo, Jian Li, Shinnosuke Kawaguchi, David W. Groechel, Dorothea Buechel-Rimmel +4 more | 2024-10-29 |
| 12062567 | Systems and methods for substrate support temperature control | Zubin Huang, Rui Cheng, Diwakar Kedlaya, Satish Radhakrishnan, Anton Baryshnikov +3 more | 2024-08-13 |
| 12057339 | Bipolar electrostatic chuck to limit DC discharge | Jian Li, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Zheng John Ye | 2024-08-06 |
| 12040210 | Multi-pressure bipolar electrostatic chucking | Jian Li, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez, Akshay Gunaji, Mayur Govind Kulkarni +6 more | 2024-07-16 |
| 11859307 | Apparatus and methods for alignment of a susceptor | Edric Tong, James Francis Mack | 2024-01-02 |