Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148597 | Multi-zone gas distribution systems and methods | Saravjeet Singh, Alan Tso, Marlin Wijekoon, Dimitri Kioussis | 2024-11-19 |
| 12002659 | Apparatus for generating etchants for remote plasma processes | Tae Seung Cho, David Benjaminson, Ryan Pakulski, Martin Yue Choy, Pratheep Gunaseelan +1 more | 2024-06-04 |
| 11915911 | Two piece electrode assembly with gap for plasma control | Tien Fak Tan, Saravjeet Singh, Dmitry Lubomirsky, Tae Wan Kim, Tae Seung Cho +1 more | 2024-02-27 |
| 11901161 | Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes | Tae Seung Cho, Saravana Kumar Natarajan, Dmitry Lubomirsky, Samartha Subramanya | 2024-02-13 |
| 11894217 | Plasma ignition optimization in semiconductor processing chambers | Soonwook Jung | 2024-02-06 |