Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12128523 | Polishing apparatus | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2024-10-29 |
| 12036634 | Substrate processing control system, substrate processing control method, and program | Koichi Takeda, Tsuneo Torikoshi, Kunio Oishi, Katsuhide Watanabe, Yu Ishii | 2024-07-16 |
| 12017323 | Polishing head system and polishing apparatus | Itsuki Kobata, Akio Yanai, Nobuyuki Takahashi, Takamasa Nakamura, Keisuke Sakata +4 more | 2024-06-25 |
| 11911872 | Substrate processing apparatus and substrate processing method | Nobuyuki Takada | 2024-02-27 |