Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183642 | Film-thickness measuring method, method of detecting notch portion, and polishing apparatus | Osamu Nabeya, Shingo Togashi | 2024-12-31 |
| 12128523 | Polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2024-10-29 |
| 12068189 | Elastic membrane, substrate holding device, and polishing apparatus | Satoru Yamaki, Makoto Fukushima, Osamu Nabeya, Shingo Togashi, Tomoko Owada +1 more | 2024-08-20 |
| 11969858 | Substrate processing apparatus | Makoto Fukushima | 2024-04-30 |
| 11958163 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Osamu Nabeya, Makoto Fukushima, Shingo Togashi, Satoru Yamaki, Masahiko Kishimoto +1 more | 2024-04-16 |