Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068189 | Elastic membrane, substrate holding device, and polishing apparatus | Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more | 2024-08-20 |
| 11958163 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Osamu Nabeya, Makoto Fukushima, Keisuke Namiki, Shingo Togashi, Satoru Yamaki +1 more | 2024-04-16 |
| D1021832 | Elastic membrane | Kenichi Akazawa, Osamu Nabeya, Shingo Togashi, Satoru Yamaki, Cheng Cheng +1 more | 2024-04-09 |