Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12128523 | Polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Shingo Togashi | 2024-10-29 |
| 12068189 | Elastic membrane, substrate holding device, and polishing apparatus | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Tomoko Owada +1 more | 2024-08-20 |
| 11958163 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Osamu Nabeya, Makoto Fukushima, Keisuke Namiki, Shingo Togashi, Masahiko Kishimoto +1 more | 2024-04-16 |
| D1021832 | Elastic membrane | Kenichi Akazawa, Osamu Nabeya, Shingo Togashi, Tomoko Owada, Cheng Cheng +1 more | 2024-04-09 |