Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11958163 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Osamu Nabeya, Makoto Fukushima, Keisuke Namiki, Shingo Togashi, Satoru Yamaki +1 more | 2024-04-16 |