Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12036634 | Substrate processing control system, substrate processing control method, and program | Koichi Takeda, Tsuneo Torikoshi, Kunio Oishi, Katsuhide Watanabe, Hozumi Yasuda | 2024-07-16 |