Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12179310 | Output signal processing apparatus for eddy current sensor | Atsushi Abe, Taro Takahashi, Hiroaki Shibue, Shinpei Tokunaga | 2024-12-31 |
| 12076834 | Eddy current sensor | Atsushi Abe, Taro Takahashi | 2024-09-03 |
| 12062563 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Keita Yagi, Yoichi Shiokawa, Toru Maruyama, Nobuyuki Takahashi | 2024-08-13 |
| 12036634 | Substrate processing control system, substrate processing control method, and program | Koichi Takeda, Tsuneo Torikoshi, Kunio Oishi, Hozumi Yasuda, Yu Ishii | 2024-07-16 |
| 12017323 | Polishing head system and polishing apparatus | Itsuki Kobata, Hozumi Yasuda, Akio Yanai, Nobuyuki Takahashi, Takamasa Nakamura +4 more | 2024-06-25 |