Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062563 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Keita Yagi, Katsuhide Watanabe, Yoichi Shiokawa, Toru Maruyama | 2024-08-13 |
| 12017323 | Polishing head system and polishing apparatus | Itsuki Kobata, Hozumi Yasuda, Akio Yanai, Takamasa Nakamura, Keisuke Sakata +4 more | 2024-06-25 |
| 11919048 | Method of cleaning an optical film-thickness measuring system | Toru Maruyama, Taichi Yokoyama, Zhongxin Wen | 2024-03-05 |
| 11881198 | Noise insulation material for automobile | Kazuki Fukui | 2024-01-23 |
| 11873399 | Resin composition, polishing pad, and method for producing polishing pad | Ryujin ISHIUCHI | 2024-01-16 |