Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12179312 | Apparatus for polishing, processing system, and method of polishing | Takuya MORIURA, Hiroshi Sotozaki, Tadakazu Sone, Masayoshi Ito, Hisanori Matsuo +1 more | 2024-12-31 |
| 12154797 | Substrate processing method and substrate processing apparatus | Yosuke Himori | 2024-11-26 |
| 12062563 | Substrate processing apparatus, substrate processing system, and substrate processing method | Keita Yagi, Katsuhide Watanabe, Yoichi Shiokawa, Toru Maruyama, Nobuyuki Takahashi | 2024-08-13 |
| 12033847 | Cleaning module, substrate processing apparatus including cleaning module, and cleaning method | Toshio Mizuno, Yosuke Himori, Erina Baba, Tomoatsu Ishibashi | 2024-07-09 |
| 12017323 | Polishing head system and polishing apparatus | Hozumi Yasuda, Akio Yanai, Nobuyuki Takahashi, Takamasa Nakamura, Keisuke Sakata +4 more | 2024-06-25 |
| 11980998 | Polishing device, polishing method, and recording medium for recording program for determining supply position of polishing liquid | Takashi Yamazaki, Ryuichi Kosuge, Tadakazu Sone | 2024-05-14 |
| 11926018 | Apparatus for polishing and method of polishing | Masayoshi Ito, Hisanori Matsuo, Takuya MORIURA | 2024-03-12 |