Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062563 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Katsuhide Watanabe, Yoichi Shiokawa, Toru Maruyama, Nobuyuki Takahashi | 2024-08-13 |
| D1028755 | Tracking device | — | 2024-05-28 |
| 11954992 | Monitoring system, monitoring method, and program | — | 2024-04-09 |
| 11945075 | Polishing apparatus and polishing member dressing method | Yasumasa Hiroo | 2024-04-02 |
| 11883922 | Substrate processing apparatus | Yuki Watanabe | 2024-01-30 |