Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062563 | Substrate processing apparatus, substrate processing system, and substrate processing method | Itsuki Kobata, Keita Yagi, Katsuhide Watanabe, Toru Maruyama, Nobuyuki Takahashi | 2024-08-13 |
| 11951588 | Optical film-thickness measuring apparatus and polishing apparatus | Masaki Kinoshita, Toshifumi Kimba, Yoshikazu Kato | 2024-04-09 |
| 11911867 | Polishing apparatus and polishing method | Toshifumi Kimba, Masaki Kinoshita | 2024-02-27 |