Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11951588 | Optical film-thickness measuring apparatus and polishing apparatus | Toshifumi Kimba, Yoshikazu Kato, Yoichi Shiokawa | 2024-04-09 |
| 11911867 | Polishing apparatus and polishing method | Toshifumi Kimba, Yoichi Shiokawa | 2024-02-27 |