Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12017323 | Polishing head system and polishing apparatus | Itsuki Kobata, Hozumi Yasuda, Akio Yanai, Nobuyuki Takahashi, Takamasa Nakamura +4 more | 2024-06-25 |
| 11911872 | Substrate processing apparatus and substrate processing method | Hozumi Yasuda | 2024-02-27 |