Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12124164 | Reflective mask blank and reflective mask | Takuma Kato, Keishi TSUKIYAMA, Toshiyuki Uno, Hiroshi Hanekawa, Ryusuke OISHI +3 more | 2024-10-22 |
| 12105412 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Hiroaki IWAOKA, Wataru Nishida, Ichiro Ishikawa, Kenichi Sasaki | 2024-10-01 |
| 12038685 | Reflective mask blank for EUV lithography | Hirotomo Kawahara, Hiroyoshi Tanabe, Toshiyuki Uno, Hiroshi Hanekawa | 2024-07-16 |
| 12001134 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Yuya Nagata, Kenichi Sasaki, Hiroaki IWAOKA | 2024-06-04 |
| 12001133 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Takuma Kato, Takeshi OKATO, Ryusuke OISHI, Yusuke Ono | 2024-06-04 |
| 11953822 | Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same | Hirotomo Kawahara, Hiroaki IWAOKA, Toshiyuki Uno, Michinori Suehara, Keishi TSUKIYAMA | 2024-04-09 |
| 11914284 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Shunya TAKI, Takuma Kato, Ichiro Ishikawa, Kenichi Sasaki | 2024-02-27 |