Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12001133 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Takuma Kato, Daijiro AKAGI, Ryusuke OISHI, Yusuke Ono | 2024-06-04 |