Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12124164 | Reflective mask blank and reflective mask | Daijiro AKAGI, Takuma Kato, Keishi TSUKIYAMA, Toshiyuki Uno, Hiroshi Hanekawa +3 more | 2024-10-22 |
| 12001133 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Takuma Kato, Daijiro AKAGI, Takeshi OKATO, Yusuke Ono | 2024-06-04 |