Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12124164 | Reflective mask blank and reflective mask | Daijiro AKAGI, Takuma Kato, Keishi TSUKIYAMA, Toshiyuki Uno, Ryusuke OISHI +3 more | 2024-10-22 |
| 12038685 | Reflective mask blank for EUV lithography | Hirotomo Kawahara, Hiroyoshi Tanabe, Toshiyuki Uno, Daijiro AKAGI | 2024-07-16 |
| 12032280 | Reflective mask blank, reflective mask, and method for manufacturing reflective mask | Taiga FUDETANI, Yusuke Ono, Shunya TAKI | 2024-07-09 |
| 11982935 | Reflective mask blank for EUV lithography | Hirotomo Kawahara, Toshiyuki Uno, Masafumi AKITA | 2024-05-14 |
| 11934093 | Reflective mask blank for EUV lithography and substrate with conductive film | Yusuke Ono, Hirotomo Kawahara | 2024-03-19 |
| 11914283 | Reflective mask blank and reflective mask | Hiroyoshi Tanabe, Toshiyuki Uno | 2024-02-27 |