Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11982935 | Reflective mask blank for EUV lithography | Hirotomo Kawahara, Hiroshi Hanekawa, Toshiyuki Uno | 2024-05-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11982935 | Reflective mask blank for EUV lithography | Hirotomo Kawahara, Hiroshi Hanekawa, Toshiyuki Uno | 2024-05-14 |