Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12038685 | Reflective mask blank for EUV lithography | Hiroyoshi Tanabe, Toshiyuki Uno, Hiroshi Hanekawa, Daijiro AKAGI | 2024-07-16 |
| 11982935 | Reflective mask blank for EUV lithography | Hiroshi Hanekawa, Toshiyuki Uno, Masafumi AKITA | 2024-05-14 |
| 11953822 | Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same | Daijiro AKAGI, Hiroaki IWAOKA, Toshiyuki Uno, Michinori Suehara, Keishi TSUKIYAMA | 2024-04-09 |
| 11934093 | Reflective mask blank for EUV lithography and substrate with conductive film | Yusuke Ono, Hiroshi Hanekawa | 2024-03-19 |