Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105412 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Daijiro AKAGI, Wataru Nishida, Ichiro Ishikawa, Kenichi Sasaki | 2024-10-01 |
| 12001134 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Yuya Nagata, Daijiro AKAGI, Kenichi Sasaki | 2024-06-04 |
| 11953822 | Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same | Hirotomo Kawahara, Daijiro AKAGI, Toshiyuki Uno, Michinori Suehara, Keishi TSUKIYAMA | 2024-04-09 |