Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105412 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Daijiro AKAGI, Hiroaki IWAOKA, Wataru Nishida, Ichiro Ishikawa | 2024-10-01 |
| 12001134 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Yuya Nagata, Daijiro AKAGI, Hiroaki IWAOKA | 2024-06-04 |
| 11914284 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Daijiro AKAGI, Shunya TAKI, Takuma Kato, Ichiro Ishikawa | 2024-02-27 |