Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12124164 | Reflective mask blank and reflective mask | Daijiro AKAGI, Takuma Kato, Keishi TSUKIYAMA, Hiroshi Hanekawa, Ryusuke OISHI +3 more | 2024-10-22 |
| 12038685 | Reflective mask blank for EUV lithography | Hirotomo Kawahara, Hiroyoshi Tanabe, Hiroshi Hanekawa, Daijiro AKAGI | 2024-07-16 |
| 11982935 | Reflective mask blank for EUV lithography | Hirotomo Kawahara, Hiroshi Hanekawa, Masafumi AKITA | 2024-05-14 |
| 11953822 | Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same | Hirotomo Kawahara, Daijiro AKAGI, Hiroaki IWAOKA, Michinori Suehara, Keishi TSUKIYAMA | 2024-04-09 |
| 11914283 | Reflective mask blank and reflective mask | Hiroyoshi Tanabe, Hiroshi Hanekawa | 2024-02-27 |