Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830751 | Plasma processing apparatus and plasma processing method | Shoichiro Matsuyama, Daiki Satoh, Takashi Nishijima, Jinyoung Park | 2023-11-28 |
| 11798791 | Substrate support and plasma processing apparatus | Shingo KOIWA | 2023-10-24 |
| 11791139 | Substrate support | Shin Yamaguchi, Koei ITO | 2023-10-17 |
| 11764038 | Plasma processing apparatus, electrostatic attraction method, and electrostatic attraction program | Shoichiro Matsuyama, Naoki Tamaru | 2023-09-19 |
| D992615 | Focus ring | Yohei Uchida, Hikaru Abe, Tomoya Ujiie | 2023-07-18 |
| D992614 | Focus ring | Yohei Uchida, Masato Takayama | 2023-07-18 |
| 11688587 | Substrate support assembly, plasma processing apparatus, and plasma processing method | Masashi IKEGAMI | 2023-06-27 |
| 11664200 | Placing table, positioning method of edge ring and substrate processing apparatus | Toshiya Tsukahara, Mitsuaki Sato | 2023-05-30 |
| 11600471 | Substrate support, plasma processing apparatus, and focus ring | Yohei Uchida | 2023-03-07 |