Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664200 | Placing table, positioning method of edge ring and substrate processing apparatus | Yasuharu Sasaki, Mitsuaki Sato | 2023-05-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664200 | Placing table, positioning method of edge ring and substrate processing apparatus | Yasuharu Sasaki, Mitsuaki Sato | 2023-05-30 |