Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804400 | Substrate processing apparatus | — | 2023-10-31 |
| 11664200 | Placing table, positioning method of edge ring and substrate processing apparatus | Yasuharu Sasaki, Toshiya Tsukahara | 2023-05-30 |