Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11688587 | Substrate support assembly, plasma processing apparatus, and plasma processing method | Yasuharu Sasaki | 2023-06-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11688587 | Substrate support assembly, plasma processing apparatus, and plasma processing method | Yasuharu Sasaki | 2023-06-27 |