Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764038 | Plasma processing apparatus, electrostatic attraction method, and electrostatic attraction program | Shoichiro Matsuyama, Yasuharu Sasaki | 2023-09-19 |
| 11715630 | Plasma processing apparatus | Yusuke Hayasaka, Shuhei Yamabe, Keisuke YOSHIMURA, Kyo Tsuboi | 2023-08-01 |
| 11705308 | Plasma processing apparatus | Shintaro Ikeda, Hidetoshi Hanaoka | 2023-07-18 |