Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830751 | Plasma processing apparatus and plasma processing method | Daiki Satoh, Yasuharu Sasaki, Takashi Nishijima, Jinyoung Park | 2023-11-28 |
| 11764038 | Plasma processing apparatus, electrostatic attraction method, and electrostatic attraction program | Naoki Tamaru, Yasuharu Sasaki | 2023-09-19 |
| 11728144 | Edge ring and substrate processing apparatus | — | 2023-08-15 |