Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11825589 | Plasma processing apparatus and plasma processing method | Tetsuji Sato, Shojiro Yahata, Taira Takase | 2023-11-21 |
| 11795346 | Polishing liquid composition for silicon oxide film | — | 2023-10-24 |
| 11717912 | Capillary guide device and wire bonding apparatus | — | 2023-08-08 |
| D992614 | Focus ring | Yasuharu Sasaki, Masato Takayama | 2023-07-18 |
| D992615 | Focus ring | Yasuharu Sasaki, Hikaru Abe, Tomoya Ujiie | 2023-07-18 |
| 11600471 | Substrate support, plasma processing apparatus, and focus ring | Yasuharu Sasaki | 2023-03-07 |