Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11825589 | Plasma processing apparatus and plasma processing method | Yohei Uchida, Tetsuji Sato, Shojiro Yahata | 2023-11-21 |
| 11705356 | Mounting table and plasma processing apparatus | Kyouhei Yamamoto | 2023-07-18 |