TS

Tetsuji Sato

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
📍 Rifu, JP: #106 of 296 inventorsTop 40%
Overall (2023): #231,956 of 537,848Top 45%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11825589 Plasma processing apparatus and plasma processing method Yohei Uchida, Shojiro Yahata, Taira Takase 2023-11-21