SY

Shojiro Yahata

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #252,566 of 537,848Top 50%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11825589 Plasma processing apparatus and plasma processing method Yohei Uchida, Tetsuji Sato, Taira Takase 2023-11-21