Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11825589 | Plasma processing apparatus and plasma processing method | Yohei Uchida, Tetsuji Sato, Taira Takase | 2023-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11825589 | Plasma processing apparatus and plasma processing method | Yohei Uchida, Tetsuji Sato, Taira Takase | 2023-11-21 |