Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728157 | Post-CMP cleaning and apparatus | Fu-Ming Huang, Liang-Guang Chen, Chun-Chieh Lin | 2023-08-15 |
| 11710659 | Metal loss prevention using implantation | Li-Chieh Wu, Tang-Kuei Chang, Kuo-Hsiu Wei, Kei-Wei Chen, Ying-Lang Wang +5 more | 2023-07-25 |
| 11705324 | Apparatus and method for wafer cleaning | Hsin-Hsien Lu, Jung-Tsan Tsai | 2023-07-18 |
| 11658065 | Chemical mechanical polishing slurry composition, method for chemical mechanical polishing and method for forming connecting structure | Ji Cui, Fu-Ming Huang, Tang-Kuei Chang, Chun-Chieh Lin, Wei-Wei Liang +7 more | 2023-05-23 |