Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705324 | Apparatus and method for wafer cleaning | Ting-Kui Chang, Jung-Tsan Tsai | 2023-07-18 |
| 11694909 | Brush cleaning apparatus, chemical-mechanical polishing (CMP) system and wafer processing method | Chang-Sheng Lin | 2023-07-04 |
| 11594455 | Semiconductor device and manufacturing method for the same | Chih-Nan Lo, Ming-Chi Huang, Ming-Hsi Yeh, Kuo-Bin Huang | 2023-02-28 |