Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705324 | Apparatus and method for wafer cleaning | Hsin-Hsien Lu, Ting-Kui Chang | 2023-07-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11705324 | Apparatus and method for wafer cleaning | Hsin-Hsien Lu, Ting-Kui Chang | 2023-07-18 |