Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11855146 | Melt anneal source and drain regions | Su-Hao Liu, Wen-Yen Chen, Li-Heng Chen, Li-Ting Wang, Liang-Yin Chen +2 more | 2023-12-26 |
| 11728172 | Wafer thinning apparatus having feedback control | Yuan-Hsuan Chen, Kei-Wei Chen, Kuo-Hsiu Wei | 2023-08-15 |
| 11710659 | Metal loss prevention using implantation | Li-Chieh Wu, Tang-Kuei Chang, Kuo-Hsiu Wei, Kei-Wei Chen, Su-Hao Liu +5 more | 2023-07-25 |
| 11685013 | Polishing pad for chemical mechanical planarization | Chih-Hung Chen, Kei-Wei Chen | 2023-06-27 |
| 11631618 | Thickness sensor for conductive features | Chih-Hung Chen, Kei-Wei Chen | 2023-04-18 |
| 11621342 | Semiconductor device, method, and tool of manufacture | Chih-Hung Chen, Kei-Wei Chen | 2023-04-04 |
| 11594636 | Source/drain structure | Su-Hao Liu, Kuo-Ju Chen, Wen-Yen Chen, Liang-Yin Chen, Li-Ting Wang +1 more | 2023-02-28 |