Issued Patents 2023
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772228 | Chemical mechanical polishing apparatus including a multi-zone platen | Ting-Hsun Chang, Hung Yen, Chi-Hsiang Shen, Fu-Ming Huang, Chun-Chieh Lin +4 more | 2023-10-03 |
| 11761751 | Thin film metrology | Kei-Wei Chen, Te-Ming Kung | 2023-09-19 |
| 11735379 | Keyswitch assembly | Li-Te Chang, Yen-Ting Chen | 2023-08-22 |
| 11721500 | Keyswitch assembly and support mechanism thereof | Li-Te Chang, Yen-Ting Chen | 2023-08-08 |
| 11685013 | Polishing pad for chemical mechanical planarization | Kei-Wei Chen, Ying-Lang Wang | 2023-06-27 |
| 11679469 | Chemical mechanical planarization tool | Michael Yen, Kao-Feng Liao, Hsin-Ying Ho, Chun-Wen Hsiao, Sheng-Chao Chuang +7 more | 2023-06-20 |
| 11675953 | Hotspot avoidance method of manufacturing integrated circuits | I-Shuo Liu, Chih-Chun Hsia, Hsin-Ting Chou, Kuanhua Su, William Weilun Hong +1 more | 2023-06-13 |
| 11631618 | Thickness sensor for conductive features | Kei-Wei Chen, Ying-Lang Wang | 2023-04-18 |
| 11621342 | Semiconductor device, method, and tool of manufacture | Kei-Wei Chen, Ying-Lang Wang | 2023-04-04 |
| D982217 | Light guiding plate having V-shaped notches | Ming-Yun Chen | 2023-03-28 |
| D982216 | Light guiding plate having v-shaped notches | Ming-Yun Chen | 2023-03-28 |
| 11574911 | Method for fabricating semiconductor device with protruding contact | Chiang-Lin Shih, Szu-Yao Chang | 2023-02-07 |