Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772228 | Chemical mechanical polishing apparatus including a multi-zone platen | Ting-Hsun Chang, Chi-Hsiang Shen, Fu-Ming Huang, Chun-Chieh Lin, Tsung-Hsien Chang +4 more | 2023-10-03 |
| 11658065 | Chemical mechanical polishing slurry composition, method for chemical mechanical polishing and method for forming connecting structure | Ji Cui, Fu-Ming Huang, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin +7 more | 2023-05-23 |