Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772228 | Chemical mechanical polishing apparatus including a multi-zone platen | Ting-Hsun Chang, Hung Yen, Chi-Hsiang Shen, Fu-Ming Huang, Chun-Chieh Lin +4 more | 2023-10-03 |
| 11718812 | Post-CMP cleaning composition for germanium-containing substrate | William Weilun Hong, Gin-Chen Huang, Shich-Chang Suen, Kei-Wei Chen | 2023-08-08 |
| 11679469 | Chemical mechanical planarization tool | Michael Yen, Kao-Feng Liao, Hsin-Ying Ho, Chun-Wen Hsiao, Sheng-Chao Chuang +7 more | 2023-06-20 |
| 11658065 | Chemical mechanical polishing slurry composition, method for chemical mechanical polishing and method for forming connecting structure | Fu-Ming Huang, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin, Wei-Wei Liang +7 more | 2023-05-23 |
| 11597854 | Method to increase barrier film removal rate in bulk tungsten slurry | William J. Ward, III, Matthew E. Carnes, Helin Huang | 2023-03-07 |